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Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology by Saburo Nonogaki, Microlithography Fundamentals in Semiconductor Devices microlithography science and technology and Fabrication Technology:
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Handbook of VLSI Microlithography: Principles, Technology, and Applications by William B. Glendinning, This handbook presents the principles, technology microlithography science and technology and applications of VLSI microlithography. It covers optical lithography, electron-beam, ion-beam, microlithography science and technology and X-ray lithography as applied to the manufacture of routine microlithography science and technology and research level VLSI devices. The book provides a more complete view of lithographic tool methods than has been presented previously.
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